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Si-SiC Metal Matrix Composite Ceramics

Ferrotec's metal matrix composites feature take advantage of various material mixes to deliver unique material properties and performance characteristics. The material properties of Silicon - Silicon Carbide metal matrix composites make it a good solution for parts that are free from surface defects. Si-SiC metal matrix materials are widely used for semiconductor and LCD manufacturing and inspection equipment.

Metal Matrix Composite Ceramics Products Photo

Benefits

  • Light Weight
  • High Stiffness
  • Low Thermal Expansion
  • High Thermal Conductivity
  • Excellent Mechanical Damping
  • Facture Toughness
  • Near Net Shape Process Allowance

Applications

  • Semiconductor Equipment Parts
  • Semiconductor Inspection Parts
  • Display Equipment Parts
  • Precision Equipment Parts
  • Heat Sinks

Si / SiC Material Properties

    Si30 / SiC70 Si25 / SiC75
Composition (vol%) Si 30
SiC 70
Si 25
SiC 75
Density (g/cm3) 2.92 3.00
Young's Modulus (Gpa) 320 340
Young's Modulus / Density (Gpa ⋅ cm3/g) 110 113
Flexural Strength (MPa) 450 230
Coefficient of Thermal Expansion (1/°C×10-6) 2.8 2.9
Thermal Conductivity (W/m×K) 145 205