MULTI-HEARTH EVAPORATORS
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EV
M5-II
The EV M-5II is a general purpose multi-hearth source for use up to a
maximum power of 5kW. It is ideal for applications requiring high deposition
rates and effective material utilization. Typical applications are production
coatings or laboratory-scale evaporations with a variety of different
materials or with materials which require continuous pocket rotation.
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EV
M-6 and M-8
The EV M-6 and M-8 are professional multi-hearth sources for optical and
other high precision applications. The EV M-6 has a maximum power of 6kW
and the EV M-8 can be used at powers of up to 10kW. These evaporators
offer a small beam spot regardless of position in the pocket and extremely
homogenous material depletion. This makes them ideal for precision applications
such as optical coating.
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EV
S-6 and S-8
The new EV S-6 and EVS-8 from Ferrotec are unique and innovative electron
beam evaporators which offers unrivalled flexibility in source location.
They are different from other electron beam evaporators in that the vacuum
compatible stepper motor and water cooling are inside the evaporator rather
than outside the chamber. This means that the EV S-6 is not constrained
by a motion feedthrough and can operate in any location or height in the
chamber. This flexibility in positioning makes it ideal for applications
such as production coatings or laboratory-scale evaporations with a variety
of different materials or with materials requiring continuous pocket rotation.
It is also ideal for system retrofits as, unlike with a traditional evaporator,
there is no need for baseplate holes to be a specific size or in particular
location.
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